低電阻率測試儀定義：

參數：

1. 材料尺寸(由選配測試臺和測試方式決定)

直(zhi) 徑：圓測試(shi)臺(tai)直(zhi)接測試(shi)方(fang)(fang)式(shi)(shi) Φ15～130mm，手持方(fang)(fang)式(shi)(shi)不(bu)限(xian)

方(fang)測試(shi)臺直接測試(shi)方(fang)式 180mm×180mm，手(shou)持方(fang)式不限(xian). 長(高)度： 測試(shi)臺直接測試(shi)方(fang)式 H≤100mm, 手(shou)持方(fang)式不限(xian).

BEST-300C 測試儀能夠測量半(ban)導體(ti)材料體(ti)電(dian)(dian)(dian)阻(zu)率ρ、方塊電(dian)(dian)(dian)阻(zu)（薄片(pian)電(dian)(dian)(dian)阻(zu)率）R 口

以(yi)及體(ti)電阻 R，測量時需(xu)調整相應的(de)修正系數(shu)和選擇相應的(de)功能(neng)。

本產品不(bu)但提(ti)供(gong)了(le)(le)電(dian)(dian)(dian)(dian)(dian)(dian)阻(zu)率ρ、方塊電(dian)(dian)(dian)(dian)(dian)(dian)阻(zu) R 口以及體電(dian)(dian)(dian)(dian)(dian)(dian)阻(zu) R 測(ce)(ce)(ce)(ce)試(shi)(shi)(shi)的基本修(xiu)(xiu)正(zheng)(zheng)(zheng)系數(shu)設定(ding)， 還提(ti)供(gong)了(le)(le)產品厚(hou)(hou)度 G、外(wai)形(xing)和測(ce)(ce)(ce)(ce)試(shi)(shi)(shi)位(wei)置的修(xiu)(xiu)正(zheng)(zheng)(zheng)系數(shu) D 設定(ding)，極大的提(ti)高(gao)(gao)了(le)(le)測(ce)(ce)(ce)(ce)試(shi)(shi)(shi)精度。測(ce)(ce)(ce)(ce)試(shi)(shi)(shi)類別的快捷選擇方式，方便了(le)(le)用戶同時測(ce)(ce)(ce)(ce)試(shi)(shi)(shi)多個參(can)數(shu)，提(ti)高(gao)(gao)測(ce)(ce)(ce)(ce)試(shi)(shi)(shi)效率。整機測(ce)(ce)(ce)(ce)量(liang)(liang)(liang)最大相對(dui)誤差：≤±3%；整機測(ce)(ce)(ce)(ce)量(liang)(liang)(liang)標準不(bu)確(que)定(ding)度：≤±3%四位(wei)半顯(xian)示(shi)(shi)讀數(shu)；八量(liang)(liang)(liang)程(cheng)自動(dong)(dong)(dong)或(huo)手(shou)動(dong)(dong)(dong)測(ce)(ce)(ce)(ce)試(shi)(shi)(shi)；范圍(wei)寬： 電(dian)(dian)(dian)(dian)(dian)(dian)阻(zu)：10-4Ω～105Ω ；方阻(zu)：10-4Ω/□～105Ω/□；正(zheng)(zheng)(zheng)反向電(dian)(dian)(dian)(dian)(dian)(dian)流(liu)(liu)(liu)源(yuan)(yuan)修(xiu)(xiu)正(zheng)(zheng)(zheng)測(ce)(ce)(ce)(ce)量(liang)(liang)(liang)電(dian)(dian)(dian)(dian)(dian)(dian)阻(zu)誤差恒流(liu)(liu)(liu)源(yuan)(yuan)：電(dian)(dian)(dian)(dian)(dian)(dian)流(liu)(liu)(liu)量(liang)(liang)(liang)程(cheng)分(fen)為： 1uA、10uA、100uA、1mA、10mA 、100mA六(liu)檔；儀器配有(you)恒流(liu)(liu)(liu)源(yuan)(yuan)開(kai)關可(ke)(ke)有(you)效保護被測(ce)(ce)(ce)(ce)件(jian)，即先讓(rang)探針頭壓觸(chu)(chu)在被測(ce)(ce)(ce)(ce)材料(liao)上，后(hou)開(kai)恒流(liu)(liu)(liu)源(yuan)(yuan)開(kai)關，避(bi)免接觸(chu)(chu)瞬間打火。為了(le)(le)提(ti)高(gao)(gao)工(gong)作效率，如探針帶(dai)電(dian)(dian)(dian)(dian)(dian)(dian)壓觸(chu)(chu)單晶對(dui)材料(liao)及測(ce)(ce)(ce)(ce)量(liang)(liang)(liang)并(bing)無(wu)影響時，恒流(liu)(liu)(liu)源(yuan)(yuan)開(kai)關可(ke)(ke)一直處于(yu)開(kai)的狀(zhuang)態。可(ke)(ke)配合多種探頭進(jin)行(xing)(xing)測(ce)(ce)(ce)(ce)試(shi)(shi)(shi)；也(ye)可(ke)(ke)配合多種測(ce)(ce)(ce)(ce)試(shi)(shi)(shi)臺進(jin)行(xing)(xing)測(ce)(ce)(ce)(ce)試(shi)(shi)(shi)。校正(zheng)(zheng)(zheng)功能：可(ke)(ke)手(shou)動(dong)(dong)(dong)或(huo)自動(dong)(dong)(dong)選擇測(ce)(ce)(ce)(ce)試(shi)(shi)(shi)量(liang)(liang)(liang)程(cheng) 全量(liang)(liang)(liang)程(cheng)自動(dong)(dong)(dong)清零。厚(hou)(hou)度可(ke)(ke)預設，自動(dong)(dong)(dong)修(xiu)(xiu)正(zheng)(zheng)(zheng)樣(yang)品的電(dian)(dian)(dian)(dian)(dian)(dian)阻(zu)率,無(wu)需(xu)(xu)查表即可(ke)(ke)計算出電(dian)(dian)(dian)(dian)(dian)(dian)阻(zu)率自動(dong)(dong)(dong)進(jin)行(xing)(xing)電(dian)(dian)(dian)(dian)(dian)(dian)流(liu)(liu)(liu)換(huan)向,并(bing)進(jin)行(xing)(xing)正(zheng)(zheng)(zheng)反向電(dian)(dian)(dian)(dian)(dian)(dian)流(liu)(liu)(liu)下的電(dian)(dian)(dian)(dian)(dian)(dian)阻(zu)率(或(huo)方塊電(dian)(dian)(dian)(dian)(dian)(dian)阻(zu))測(ce)(ce)(ce)(ce)量(liang)(liang)(liang),顯(xian)示(shi)(shi)平(ping)均值.測(ce)(ce)(ce)(ce)薄片時,可(ke)(ke)自動(dong)(dong)(dong)進(jin)行(xing)(xing)厚(hou)(hou)度修(xiu)(xiu)正(zheng)(zheng)(zheng)。雙電(dian)(dian)(dian)(dian)(dian)(dian)測(ce)(ce)(ce)(ce)測(ce)(ce)(ce)(ce)試(shi)(shi)(shi)模式，測(ce)(ce)(ce)(ce)量(liang)(liang)(liang)精度高(gao)(gao)、穩定(ding)性好.具(ju)備(bei)溫度補償功能，修(xiu)(xiu)正(zheng)(zheng)(zheng)被測(ce)(ce)(ce)(ce)材料(liao)溫漂(piao)帶(dai)來的測(ce)(ce)(ce)(ce)試(shi)(shi)(shi)結(jie)果偏差。比較器判斷燈直接顯(xian)示(shi)(shi)，勿需(xu)(xu)查看屏幕，作業(ye)效率得以提(ti)高(gao)(gao)。

3檔分(fen)選功(gong)能：超上限，合格，超下限，可對被測(ce)件進行HI/LOW判斷，可直接(jie)在(zai)LCD使用(yong)標志顯(xian)示；也可通過(guo)USB接(jie)口(kou)、RS232接(jie)口(kou)輸出更為詳細的(de)分(fen)選結(jie)果(guo)。測(ce)試(shi)(shi)模(mo)式：可連接(jie)電(dian)腦測(ce)試(shi)(shi)、也可不連接(jie)電(dian)腦單機測(ce)試(shi)(shi)。接(jie)口(kou)，Handler接(jie)口(kou)、RS232接(jie)口(kou)、USB HOST、USB DEVICE。實現遠程控(kong)制。U盤(pan)可記(ji)錄測(ce)試(shi)(shi)數(shu)(shu)據軟(ruan)件功(gong)能（選配）：軟(ruan)件可記(ji)錄、保存、各點的(de)測(ce)試(shi)(shi)數(shu)(shu)據；可供(gong)用(yong)戶對數(shu)(shu)據進行各種數(shu)(shu)據分(fen)

在設定(ding)模式下(xia)（設定(ding)完(wan)畢，保存好數據后），選擇測量類別（電(dian)阻率ρ、方塊(kuai)電(dian)阻

（薄片電阻(zu)率(lv)）R 口(kou)(kou)或(huo)體(ti)電阻(zu) R 中三選一，切換儀器到“測(ce)(ce)量(liang)"模(mo)式，窗口(kou)(kou)左側(ce)“測(ce)(ce)量(liang)" 模(mo)式燈亮(liang)。電阻(zu)測(ce)(ce)量(liang),注意良(liang)好接觸(chu)，電壓測(ce)(ce)試端(duan)在內(nei)側(ce)；半導體(ti)參(can)數測(ce)(ce)試，將探(tan)針與樣品良(liang)好接觸(chu)，注意壓力(li)要適中；由數字顯示窗直接讀出測(ce)(ce)量(liang)值(zhi)。

注意！測量(liang)(liang)狀態中，電(dian)流(liu)(liu)(liu)量(liang)(liang)程默認為(wei)自動(dong)方(fang)式，也(ye)可調(diao)(diao)整為(wei)手動(dong)方(fang)式，手動(dong)方(fang)式下(xia)， 電(dian)流(liu)(liu)(liu)量(liang)(liang)程適(shi)合(he)的(de)，儀器會穩定(ding)顯示數據，電(dian)流(liu)(liu)(liu)量(liang)(liang)程不(bu)適(shi)合(he)的(de)會給出(chu)超(chao)量(liang)(liang)程或(huo)欠(qian)量(liang)(liang)程閃爍提示，對(dui)于(yu)超(chao)量(liang)(liang)程，說明電(dian)流(liu)(liu)(liu)過(guo)大(da)，要調(diao)(diao)到(dao)(dao)較小(xiao)(xiao)電(dian)流(liu)(liu)(liu)檔；對(dui)于(yu)欠(qian)量(liang)(liang)程，說明電(dian)流(liu)(liu)(liu)過(guo)小(xiao)(xiao)， 要調(diao)(diao)到(dao)(dao)較大(da)電(dian)流(liu)(liu)(liu)檔。

低電阻率測試儀注意事項：